US Patent Issued to Applied Materials on April 7 for "Inductively coupled plasma apparatus with novel faraday shield" (Massachusetts, New Hampshire Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,588, issued on April 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Inductively coupled plasma apparatus with novel faraday shield" was invented by Benjamin Alexandrovich (Brookline, Mass.), Peter F. Kurunczi (Cambridge, Mass.), David Morrell (Wakefield, Mass.) and Adam Calkins (Newmarket, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An antenna assembly. The antenna assembly may include an antenna, having a loop structure, and a dielectric window, adjacent to the antenna. The antenna assembly may also include a Faraday shield assembly disposed between the antenna and the dielectric window, where the Faraday shield assembly ...