US Patent Issued to Applied Materials on April 7 for "Flexible monomer for smooth polymer surface" (Singaporean, American Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,969, issued on April 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Flexible monomer for smooth polymer surface" was invented by Feng Q. Liu (San Jose, Calif.), Xinke Wang (Singapore), Liqi Wu (San Jose, Calif.), Qihao Zhu (Sunnyvale, Calif.), Bhaskar Jyoti Bhuyan (San Jose, Calif.), Mark Saly (Santa Clara, Calif.) and David Thompson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure relate to methods of selectively depositing a metal after use of a flowable polymer to protect a substrate surface within a feature. A first metal layer is deposited by physical vapor deposition (PVD). The s...