ALEXANDRIA, Va., April 7 -- United States Patent no. 12,595,553, issued on April 7, was assigned to ANGSTROM ENGINEERING INC. (Kitchener, Canada).

"System and method for controlling film thickness, and film deposition system and method using same" was invented by Jonathan Boulanger (Burlington, Canada), David Pitts (Guelph, Canada), Andrew Campbell (Kitchener, Canada), Erik Smith (Woodstock, Canada), Paul Clarke (Guelph, Canada), Timothy Brenner (Kitchener, Canada), Mike Miller (Kitchener, Canada) and Craig Reynolds (Elora, Canada).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described are various embodiments of a system and method for controlling film thickness, and a film deposition system and method usin...