ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,744,184, issued on Sept. 22, was assigned to Advanced Energy Industries Inc. (Denver).
"Integrated control of a plasma processing system" was invented by Gideon Van Zyl (Fort Collins, Colo.) and Thomas Joel Blackburn (Fort Collins, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Plasma processing systems and power delivery methods are disclosed. A system may comprise at least one modulating supply that modulates plasma properties where the modulation of the plasma properties has a repetition period, T. Electrical characteristics of an output of the modulating supply are monitored and provided to a controller where the electrical characteristics ar...