US Patent Issued to Advanced Energy Industries on Oct. 20 for "Enhanced capacitance sensing system for electrostatic chuck devices" (New York Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,768,637, issued on Oct. 20, was assigned to Advanced Energy Industries Inc. (Denver).

"Enhanced capacitance sensing system for electrostatic chuck devices" was invented by Donald J. Enzinna (Lockport, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck system and method for determining workpiece bow are disclosed. The system includes a power supply configured to generate high DC voltages for chucking forces and low AC voltages for capacitance sensing. A multi-segmented chuck is driven by multiple outputs of the power supply. A capacitance monitor incorporated in the power supply measures load capacitance by sensing current due to ...