ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,752,438, issued on Oct. 6, was assigned to Absolics Inc. (Covington, Ga.).
"Substrate gripper and method for moving a substrate using the same" was invented by Chaemook Lim (Hwaseong-si, South Korea) and Jae Won Lee (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate gripper and a method of transferring a substrate using the same, includes a frame, a plurality of pad holes connected to the frame, and a plurality of suction pads disposed on the frame and connected to the pad holes, wherein the suction pad has a contact surface which comes into contact with one surface of a target substrate when the target substrate is moun...