ALEXANDRIA, Va., July 21 -- United States Patent no. 12,686,613, issued on July 21, was assigned to AAC Technologies Pte. Ltd. (Singapore).
"MEMS device" was invented by Colin Robert Jenkins (Edinburgh, Great Britain), Scott Lyall Cargill (Edinburgh, Great Britain) and Euan James Boyd (Edinburgh, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "An MEMS device, including: a substrate having a back cavity; a diaphragm connected to the substrate and covers the back cavity, the diaphragm includes first and second membranes arranged oppositely, and accommodation space is formed therebetween; a counter electrode in the accommodation space and includes annular beams and first spokes, the annular beams a...