US Patent Issued on April 7 for "Systems and methods for ex-situ bakeout of differentially pumped vacuum chambers" (California Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,594,619, issued on April 7.

"Systems and methods for ex-situ bakeout of differentially pumped vacuum chambers" was invented by Nicholas Petrone (San Jose, Calif.) and Lawrence Muray (Moraga, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The system includes a high vacuum chamber, a bakeout chamber, and an ultra-high vacuum (UHV) chamber that is configured to be removably disposed on the high vacuum chamber and the bakeout chamber. The system further includes a heating element configured to heat the UHV chamber and desorb water vapor from the UHV chamber with the UHV chamber disposed on the bakeout chamber, and a gas source configured to supply a ...