International Patent: ULTRA-THIN, ULTRA-LOW DENSITY FILMS WITH THIN MOLYBDENUM DISILICIDE COATING FOR EXTREME ULTRAVIOLET LITHOGRAPHY

GENEVA, Aug. 14 -- LINTEC OF AMERICA, INC. filed a patent application (US2026/014116) for “ULTRA-THIN, ULTRA-LOW DENSITY FILMS WITH THIN MOLYBDENUM DISILICIDE COATING FOR EXTREME ULTRAVIOLET LITHOGRAPHY”. With publication no. WO/2026/169891, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G03F 1/22

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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