INTERNATIONAL PATENT: TOKYO ELECTRON LIMITED, TOKYO ELECTRON U.S. HOLDINGS, INC. FILES APPLICATION FOR "METHOD OF SUSTAINING PLASMA FOR PLASMA PROCESSING"

GENEVA, March 11 -- TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-kuTokyo, 107-6325), TOKYO ELECTRON U.S. HOLDINGS, INC. (401 S 1st StSuite 900Austin, Texas 78704) filed a patent application (PCT/US2025/039332) for "METHOD OF SUSTAINING PLASMA FOR PLASMA PROCESSING" on Jul 25, 2025. With publication no. WO/2026/049920, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHEN, Zhiying (401 S. 1st St.Suite 900Austin, Texas 78704), CARRUTH, Megan (401 S. 1st St.Suite 900Austin, Texas 78704), BLAKENEY, Joel (401 S. 1st St.S...