INTERNATIONAL PATENT: TECH UNIVERSITY OF KOREA INDUSTRY ACADEMIC COOPERATION FOUNDATION, 한국공학대학교산학협력단 FILES APPLICATION FOR "PLASMA CHAMBER LEAK DETECTION DEVICE AND DETECTION METHOD USING SAME"

GENEVA, March 10 -- TECH UNIVERSITY OF KOREA INDUSTRY ACADEMIC COOPERATION FOUNDATION (237 Sangidaehak-roSiheung-siGyeonggi-do 15073), 한국공학대학교산학협력단 (경기도시흥시산기대학로 237) filed a patent application (PCT/KR2024/018587) for "PLASMA CHAMBER LEAK DETECTION DEVICE AND DETECTION METHOD USING SAME" on Nov 22, 2024. With publication no. WO/2026/049135, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organizatio...