GENEVA, Aug. 7 -- LAM RESEARCH CORPORATION filed a patent application (US2026/012371) for “SYSTEMS AND METHODS FOR ACHIEVING A PREDETERMINED ION ENERGY DISTRIBUTION FUNCTION WITH A NONSINUSOIDAL BIAS GENERATOR”. With publication no. WO/2026/164931, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01J 37/32
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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