International Patent: SUBSTRATE PROCESSING DEVICE, HEAT TRANSFER MEMBER, TRAY, PLASMA PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD

GENEVA, June 19 -- TOKYO ELECTRON LIMITED filed a patent application (JP2025/039095) for “SUBSTRATE PROCESSING DEVICE, HEAT TRANSFER MEMBER, TRAY, PLASMA PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD”. With publication no. WO/2026/105687, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H10P 50/20

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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