International Patent: SUBSTRATE HOLDER UNIT FOR TREATING A SUBSTRATE BY MEANS OF A PROCESS FLUID, AND SEAL MEMBER FOR A SUBSTRATE HOLDER UNIT

GENEVA, Oct. 30 -- LAM RESEARCH SALZBURG GMBH filed a patent application (EP2026/061633) for “SUBSTRATE HOLDER UNIT FOR TREATING A SUBSTRATE BY MEANS OF A PROCESS FLUID, AND SEAL MEMBER FOR A SUBSTRATE HOLDER UNIT”. With publication no. WO/2026/224251, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: C25D 17/06

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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