International Patent: SUBSTRATE DETECTION DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE DELIVERY DEVICE, SUBSTRATE CLEANING DEVICE, AND SUBSTRATE DETECTION METHOD

GENEVA, June 19 -- EBARA CORPORATION filed a patent application (JP2025/037564) for “SUBSTRATE DETECTION DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE DELIVERY DEVICE, SUBSTRATE CLEANING DEVICE, AND SUBSTRATE DETECTION METHOD”. With publication no. WO/2026/105561, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H01L 21/68

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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