GENEVA, Oct. 5 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. filed a patent application (CN2026/083929) for “SEMICONDUCTOR PROCESS APPARATUS AND PLASMA SOURCE THEREOF”. With publication no. WO/2026/200619, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01J 37/32
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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