GENEVA, March 31 -- PSK HOLDINGS INC. (48, Samsung 1-ro 4-gilHwaseong-siGyeonggi-do 18449), 피에스케이홀딩스 (주) (경기도화성시삼성1로4길 48) filed a patent application (PCT/KR2025/013968) for "SUBSTRATE PROCESSING APPARATUS INCLUDING COOLING MODULE" on Sep 09, 2025. With publication no. WO/2026/063675, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JUN, Saebyul (48, Samsung 1-ro 4-gilHwaseong-siGyeonggi-do 1...