International Patent: PROTECTIVE LINER MEMBER FOR DRY ETCHING DEVICE, AND DRY ETCHING DEVICE INCLUDING SAME

GENEVA, July 1 -- AP SYSTEMS INC. filed a patent application (KR2025/012597) for “PROTECTIVE LINER MEMBER FOR DRY ETCHING DEVICE, AND DRY ETCHING DEVICE INCLUDING SAME”. With publication no. WO/2026/127267, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H01J 37/32

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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