GENEVA, Aug. 7 -- WONIK IPS CO., LTD filed a patent application (KR2025/095768) for “PLASMA SOURCE AND SUBSTRATE PROCESSING DEVICE”. With publication no. WO/2026/164391, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01J 37/32
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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