GENEVA, June 26 -- SHANGHAI BANGXIN SEMI TECHNOLOGY CO., LTD. filed a patent application (CN2025/113061) for “PLASMA PROCESSING APPARATUS”. With publication no. WO/2026/118513, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: H01J 37/32

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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