GENEVA, March 2 -- PICOSUN OY (Tietotie 302150 Espoo) filed a patent application (PCT/FI2025/050409) for "SHOWERHEAD ASSEMBLY AND METHOD" on Jul 24, 2025. With publication no. WO/2026/041827, the details related to the patent application was published on Feb 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SHARMA, Varun (c/o Picosun Oy, Masalantie 36502430 Masala), MUHAMMAD, Safdar (c/o Picosun Oy, Masalantie 36502430 Masala)
Abstract: A method and a showerhead assembly (100) for a substrate processing apparatus (200), comprising a bottom wall (130) and a top wall (120) defining a first ...