GENEVA, July 6 -- SUZHOU MEGAROBO TECHNOLOGIES CO., LTD. filed a patent application (CN2025/123935) for “OVERLAY MEASUREMENT METHOD, APPARATUS, AND DEVICE, AND STORAGE MEDIUM”. With publication no. WO/2026/138036, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G03F 7/20
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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