International Patent: OUT-COUPLING TECHNIQUES FOR ACCELERATOR-BASED LIGHT SOURCES IN SEMICONDUCTOR METROLOGY AND INSPECTION APPLICATIONS

GENEVA, Aug. 14 -- YTOOLS INC. filed a patent application (US2025/037039) for “OUT-COUPLING TECHNIQUES FOR ACCELERATOR-BASED LIGHT SOURCES IN SEMICONDUCTOR METROLOGY AND INSPECTION APPLICATIONS”. With publication no. WO/2026/169280, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G03F 7/20

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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