GENEVA, Aug. 21 -- BROOKS AUTOMATION (GERMANY) GMBH filed a patent application (EP2025/054073) for “METHOD FOR PURGING A RETICLE STOCKER”. With publication no. WO/2026/171360, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01L 21/673
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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