International Patent: METHOD FOR DETECTING PROCESS ABNORMALITY, PROGRAM STORED IN RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

GENEVA, Aug. 7 -- PSK INC. filed a patent application (KR2026/000537) for “METHOD FOR DETECTING PROCESS ABNORMALITY, PROGRAM STORED IN RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS”. With publication no. WO/2026/164405, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G05B 23/02

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

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