International Patent: METHOD AND SYSTEM FOR CORRECTING A SHAPE OF A SUBSTRATE USING A TWO-DIMENSIONAL ILLUMINATION PATTERN

GENEVA, Sept. 24 -- CARL ZEISS SMT GMBH filed a patent application (EP2026/056940) for “METHOD AND SYSTEM FOR CORRECTING A SHAPE OF A SUBSTRATE USING A TWO-DIMENSIONAL ILLUMINATION PATTERN”. With publication no. WO/2026/195469, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G03F 7/00

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Disclaimer: Curated by HT Syndication....