GENEVA, July 27 -- KLA CORPORATION filed a patent application (US2025/041422) for “METHOD AND APPARATUS FOR THE ENHANCED OPTICS PROTECTION FROM THE ADVERSE EFFECTS OF PLASMA UNDER VACUUM CONDITIONS”. With publication no. WO/2026/155771, here are the other details related to the patent application:
Kind: Initial Publication without ISR [A2]
IPC: H05G 2/00
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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