INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "TECHNIQUES FOR THERMAL MANAGEMENT OF A PRECURSOR DELIVERY LINE"

GENEVA, Jan. 6 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/035083) for "TECHNIQUES FOR THERMAL MANAGEMENT OF A PRECURSOR DELIVERY LINE" on Jun 24, 2025. With publication no. WO/2026/006337, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BREES, Marvin Clayton (4650 Cushing Pkwy.Fremont, California 94538), SHARMA, Davinder (4650 Cushing Pkwy.Fremont, California 94538), PAI, Uday (4650 Cushing Pkwy.Fremont, California 94538), WONGSENAKHUM, Panya (4650 Cush...