INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SELECTIVE ETCH WITH PASSIVATION TUNING"

GENEVA, March 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/043229) for "SELECTIVE ETCH WITH PASSIVATION TUNING" on Aug 22, 2025. With publication no. WO/2026/064073, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VEBER, Gregory Clinton (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), WONG, Merrett (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), XU, Qing (c/o Lam Research Co...