INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PSEUDO-FRACTAL SHOWERHEAD FOR SUBSTRATE PROCESSING TOOL"

GENEVA, March 11 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/044002) for "PSEUDO-FRACTAL SHOWERHEAD FOR SUBSTRATE PROCESSING TOOL" on Aug 28, 2025. With publication no. WO/2026/050539, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PATIL, Ravikumar (4650 Cushing ParkwayFremont, California 94538), HOSUR SHIVALINGE GOWDA, Arun Kumar (4650 Cushing ParkwayFremont, California 94538), KUBASAD, Sachin Allamaprabhu (4650 Cushing ParkwayFremont, California 945...