INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PLASMA HEATING TO MAINTAIN STABLE SHOWERHEAD TEMPERATURE TO IMPROVE WAFER-TO-WAFER PERFORMANCE"

GENEVA, March 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/044539) for "PLASMA HEATING TO MAINTAIN STABLE SHOWERHEAD TEMPERATURE TO IMPROVE WAFER-TO-WAFER PERFORMANCE" on Sep 02, 2025. With publication no. WO/2026/055161, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HOU, Yuchen (c/o Lam Research Corporation4650 Cushing Pkwy.Fermont, California 94538), KANG, Hu (c/o Lam Research Corporation4650 Cushing Pkwy.Fremont, California 94538), WANG, Dong (c/o...