INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PLASMA ETCHING WITH REDUCED POWER AND ETCH CHEMISTRY"

GENEVA, March 31 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/046437) for "PLASMA ETCHING WITH REDUCED POWER AND ETCH CHEMISTRY" on Sep 15, 2025. With publication no. WO/2026/064248, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LILL, Thorsten (4650 Cushing Pkwy.Fremont, California 94538), WANG, Mingmei (4650 Cushing Pkwy.Fremont, California 94538), OH, Youn-Jin (4650 Cushing Pkwy.Fremont, California 94538), SINGH, Harmeet (4650 Cushing Pkwy.Fremont, Ca...