INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "PASSIVATION DURING SILICON ETCH"

GENEVA, Jan. 6 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/035027) for "PASSIVATION DURING SILICON ETCH" on Jun 24, 2025. With publication no. WO/2026/006295, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHU, Ji (4650 Cushing Pkwy.Fremont, California 94538), GORDON, Madeleine Parker (4650 Cushing Pkwy.Fremont, California 94538), KAWAGUCHI, Mark Naoshi (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: Methods and apparatuses for etching silicon ...