GENEVA, April 13 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/EP2025/073606) for "METHOD AND APPARATUS FOR CONTROLLING THE TEMPERATURE OF A WAFER" on Aug 18, 2025. With publication no. WO/2026/073621, the details related to the patent application was published on Apr 09, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BAYLISS, Christopher (c/o METRYX LTD.1240 Park AvenueAztec West, AlmondsburyBristol BS32 4SH)
Abstract: Method of controlling the temperature of a wafer, comprising: detecting information relating to the temperature of the...