GENEVA, March 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/045552) for "GROUNDING FEATURES FOR WAFER PROCESSING EQUIPMENT" on Sep 09, 2025. With publication no. WO/2026/064168, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FRENCH, David (4650 Cushing ParkwayFremont, CA 94538), BINGHAM, Bruce Christopher (4650 Cushing ParkwayFremont, CA 94538), VASQUEZ, Miguel Benjamin (4650 Cushing ParkwayFremont, CA 94538), ALTECOR, Aleksey V (4650 Cushing ParkwayFremont,...