INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "FILLING HIGH ASPECT RATIO FEATURES ON SUBSTRATES"

GENEVA, Feb. 24 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/041033) for "FILLING HIGH ASPECT RATIO FEATURES ON SUBSTRATES" on Aug 07, 2025. With publication no. WO/2026/039272, the details related to the patent application was published on Feb 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHANDRASHEKAR, Anand (4650 Cushing ParkwayFremont, California 94538), CHEN, Xitong (4650 Cushing ParkwayFremont, California 94538), RAO, Shreesha Yogish (4650 Cushing ParkwayFremont, California 94538), BIRRU, Krishna (4650 Cushing ...