INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ETCH WITH CONFORMAL DEPOSITION LINER"

GENEVA, April 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/048163) for "ETCH WITH CONFORMAL DEPOSITION LINER" on Sep 26, 2025. With publication no. WO/2026/080239, the details related to the patent application was published on Apr 16, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KUMAR, Prabhat (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), OZEL, Taner (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), WONG, Merrett (c/o Lam Research Corporati...