INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ELECTROSTATIC SHIELDS FOR PLASMA PROCESSING CHAMBERS"

GENEVA, May 12 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/051774) for "ELECTROSTATIC SHIELDS FOR PLASMA PROCESSING CHAMBERS" on Oct 21, 2025. With publication no. WO/2026/096236, the details related to the patent application was published on May 07, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CUI, Linying (4650 Cushing ParkwayFremont, California 94538), BENJAMIN, Neil M.P. (4650 Cushing ParkwayFremont, California 94538)

Abstract: A system includes a substrate processing chamber, one or more coils arranged along the ...