INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ELECTROSTATIC CHUCK WITH MULTI-SPLAT DIELECTRIC COATING APPLIED TO BASE PLATE"

GENEVA, March 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/046828) for "ELECTROSTATIC CHUCK WITH MULTI-SPLAT DIELECTRIC COATING APPLIED TO BASE PLATE" on Sep 17, 2025. With publication no. WO/2026/064423, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WETZEL, David Joseph (4650 Cushing ParkwayFremont, California 94538), DAUGHERTY, John (4650 Cushing ParkwayFremont, California 94538), XU, Lin (4650 Cushing ParkwayFremont, California 94538), PAPE, Eri...