INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ELECTROSTATIC CHUCK CONFIGURED TO PROVIDE CONSISTENT CLAMPING FORCE"

GENEVA, April 15 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/049283) for "ELECTROSTATIC CHUCK CONFIGURED TO PROVIDE CONSISTENT CLAMPING FORCE" on Oct 02, 2025. With publication no. WO/2026/076271, the details related to the patent application was published on Apr 09, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SAURABH, Ashish (4650 Cushing ParkwayFremont, California 94538)

Abstract: Examples relating to an electrostatic chuck (ESC) for clamping a substrate in a manner that provides consistent radial clamping force ac...