INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CYCLIC GAPFILL WITH SELECTIVE ETCH"

GENEVA, March 11 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/044028) for "CYCLIC GAPFILL WITH SELECTIVE ETCH" on Aug 28, 2025. With publication no. WO/2026/050554, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): IMADE, Mamoru (4650 Cushing ParkwayFremont, California 94538), AGARWAL, Pulkit (4650 Cushing ParkwayFremont, California 94538), BAKER, Jonathan Grant (4650 Cushing ParkwayFremont, California 94538)

Abstract: Examples are disclosed that relate ...