INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SYSTEM AND METHOD FOR TARGET CENTERING DETECTION IN OVERLAY METROLOGY"

GENEVA, March 18 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/042682) for "SYSTEM AND METHOD FOR TARGET CENTERING DETECTION IN OVERLAY METROLOGY" on Aug 20, 2025. With publication no. WO/2026/054976, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MANOS, Ofer (HaLavyan 123100 Migdal HaEmek), GRECHIN, Sveta (HaLavyan 12353401 Migdal HaEmek), TRIFON, Ran (HaLavyan 12353401 Migdal HaEmek), YU, Yang (HaLavyan 123100 Migdal HaEmek), HEGAZE, Hamode (Mohamed) (HaLavya...