GENEVA, Feb. 24 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/041566) for "PHOTON EFFICIENT FIELD UNIFORMITY ENHANCEMENT FOR INSPECTION TOOLS" on Aug 12, 2025. With publication no. WO/2026/039378, the details related to the patent application was published on Feb 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): ATRY, Farid (1924 Queen Mary Ct.San Jose, California 95132), BYKANOV, Alexander (2489 Nabal StreetEscondido, California 92025), ROSENTHAL, Alon (5 Tower DriveWeston, Connecticut 06883), SHI, Rui-Fang (19842 Portal PlazaCu...