INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METHODS OF CALIBRATING A LANDING ANGLE OF AN ELECTRON BEAM"

GENEVA, March 24 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/043831) for "METHODS OF CALIBRATING A LANDING ANGLE OF AN ELECTRON BEAM" on Aug 28, 2025. With publication no. WO/2026/059737, the details related to the patent application was published on Mar 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LI, Da (2830 Dillon Dr.Ann Arbor, Michigan 48105), WANG, Miao (Room 306, Building No.2, Sheng Da QingChun Li 2.0, Lane 288, Pudong New DistrictShanghai, Shanghai 200120), SUN, Yukun (50086 Thatcher St.Canton, Michigan 48188), WA...