GENEVA, Jan. 6 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/035096) for "DUV LED ARRAY FOR AN ULTRAVIOLET-OZONE CLEANING SYSTEM" on Jun 24, 2025. With publication no. WO/2026/006344, the details related to the patent application was published on Jan 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PURVIN, Kira (29773 Wexford BoulevardNovi, Michigan 48377), CHAN, Tara (4382 Lake Forest Dr EAnn Arbor, Michigan 48108), FAUST, Mitchell (201 S 1st St. Apt 331Ann Arbor, Michigan 48104), SI, Hongbo (2860 Dillon Dr.Ann Arbor, Michigan ...