GENEVA, Jan. 6 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/035321) for "ASSEMBLY FOR AN ULTRAVIOLET-OZONE CLEANING SYSTEM" on Jun 26, 2025. With publication no. WO/2026/006500, the details related to the patent application was published on Jan 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): CHAN, Tara (4382 Lake Forest Dr EAnn Arbor, Michigan 48108), FAUST, Mitchell (201 S 1st St. Apt 331Ann Arbor, Michigan 48104), PURVIN, Kira (29773 Wexford BoulevardNovi, Michigan 48377), SI, HongBo (2860 Dillon DrAnn Arbor, Michigan 48105)...