INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "ACTINIC RUN TIME SYSTEM DIAGNOSTICS OF EUV RETICLE INSPECTION AND IMAGING SYSTEMS USING MINIATURIZED EUV CALIBRATION TARGETS"

GENEVA, Feb. 24 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/040803) for "ACTINIC RUN TIME SYSTEM DIAGNOSTICS OF EUV RETICLE INSPECTION AND IMAGING SYSTEMS USING MINIATURIZED EUV CALIBRATION TARGETS" on Aug 06, 2025. With publication no. WO/2026/039243, the details related to the patent application was published on Feb 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RAJENDRAN, Rajeev (1176 Dolores StreetSan Francisco, California 94110), ATRY, Farid (1924 Queen Mary Ct.San Jose, California 95132), SHI, Rui-Fang (19842 Portal Pl...