INTERNATIONAL PATENT: KABUSHIKI KAISHA YASKAWA DENKI, 株式会社安川電機 FILES APPLICATION FOR "SUBSTRATE TRANSFER ROBOT SYSTEM, SUBSTRATE TRANSFER APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, MAINTENANCE METHOD AND SUBSTRATE TRANSFER METHOD"

GENEVA, May 11 -- KABUSHIKI KAISHA YASKAWA DENKI (2-1, Kurosaki-Shiroishi, Yahatanishi-ku, Kitakyushu-shi, Fukuoka8060004), 株式会社安川電機 (福岡県北九州市八幡西区黒崎城石２番１号) filed a patent application (PCT/JP2025/028191) for "SUBSTRATE TRANSFER ROBOT SYSTEM, SUBSTRATE TRANSFER APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, MAINTENANCE METHOD, AND SUBSTRATE TRANSFER METHOD" on Aug 07, 2025. With publication no. WO/2026/094365, the details related to the patent application was published on May 07, 2026.

Notably, the patent application was submitted under the International...