INTERNATIONAL PATENT: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES, 中国科学院微电子研究所 FILES APPLICATION FOR "PLASMONIC LITHOGRAPHIC IMAGING METHOD AND APPARATUS AND COMPUTER-READABLE MEDIUM"

GENEVA, March 29 -- INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES (No.3 Beitucheng West RoadChaoyang District, Beijing 100029), 中国科学院微电子研究所 (中国北京市朝阳区北土城西路3号) filed a patent application (PCT/CN2025/122542) for "PLASMONIC LITHOGRAPHIC IMAGING METHOD AND APPARATUS, AND COMPUTER-READABLE MEDIUM" on Sep 19, 2025. With publication no. WO/2026/061482, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World I...