GENEVA, June 26 -- CANON TOKKI CORPORATION filed a patent application (JP2025/041509) for “INSPECTION DEVICE, FILM FORMATION DEVICE, INSPECTION METHOD, AND ELECTRONIC DEVICE PRODUCTION METHOD”. With publication no. WO/2026/121133, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 14/52
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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